A strip-like structure has been observed in a low-pressure radio frequency (RF) induced plasma, where a magnetic field perpendicular to the plasma flow is introduced in order to filter out the electrons. This structure forms for a broad set of parameters in different gases. It seems to result from an E × B drift due to the capacitive coupling of the antenna to the grounded chamber walls. Measurements indicate that the strip acts as a path for the electrons to cross the magnetic field. This strip formation can be avoided by introducing a Faraday shield between the antenna and the discharge tube. The electrostatic field between the antenna and the Faraday shield will be localized and the coupling of the plasma will be essentially inductive. 1
This thesis details experiments of low pressure plasmas interacting with magnetic nozzles in two dif...
The design and characterization of an innovative device for plasma cleaning, based upon a non-conven...
International audienceWe study the current distribution and input impedance of a circular loop anten...
International audienceIn this paper we experimentally investigate the drift of electrons in low temp...
Local plasma biasings due to RF sheaths close to ICRF antennas result mainly in a negative DC curren...
International audienceBy placing a magnetic filter across a rectangular plasma source (closed at one...
Electron transport in CF4 under linearly gradient antiparallel magnetic fields was analysed in order...
Present paper is aimed to reveal experimentally and theoretically the influence of magnetic field st...
Adopting the usual cold plasma dielectric tensor and an expression for the Ponderomotive force in pr...
Radio frequency waves do not penetrate into a plasma and are damped within it. The electric field of...
© Published under licence by IOP Publishing Ltd. The effect of ring or semi-ring shaped plasma struc...
We used helical antenna-coupled radio frequency (RF) plasmas to study the evolution of the mode tran...
This thesis details experiments of low pressure plasmas interacting with magnetic nozzles in two dif...
The design and characterization of an innovative device for plasma cleaning, based upon a non-conven...
International audienceWe study the current distribution and input impedance of a circular loop anten...
International audienceIn this paper we experimentally investigate the drift of electrons in low temp...
Local plasma biasings due to RF sheaths close to ICRF antennas result mainly in a negative DC curren...
International audienceBy placing a magnetic filter across a rectangular plasma source (closed at one...
Electron transport in CF4 under linearly gradient antiparallel magnetic fields was analysed in order...
Present paper is aimed to reveal experimentally and theoretically the influence of magnetic field st...
Adopting the usual cold plasma dielectric tensor and an expression for the Ponderomotive force in pr...
Radio frequency waves do not penetrate into a plasma and are damped within it. The electric field of...
© Published under licence by IOP Publishing Ltd. The effect of ring or semi-ring shaped plasma struc...
We used helical antenna-coupled radio frequency (RF) plasmas to study the evolution of the mode tran...
This thesis details experiments of low pressure plasmas interacting with magnetic nozzles in two dif...
The design and characterization of an innovative device for plasma cleaning, based upon a non-conven...
International audienceWe study the current distribution and input impedance of a circular loop anten...