and Ilona Rolfes2 1Lehrstuhl für Theoretische Elektrotechnik,

We present an electromagnetic study of the “multipole resonance probe ” – a diagnostic concept which enables the simultaneous determination of plasma density, electron temper-ature, and collision rate of low-pressure gas discharges. The multipole resonance probe is a radio-frequency driven probe of particular spherical design. In an idealized way the probe consists of two dielectrically shielded, conducting hemispheres. Driven by a radio-frequency source, the hemispheres are powered symmetrically. An analysis of the measured absorption spectrum shows a multitude of resonances. The signal provides information on the distri-bution of the plasma in the probe’s vicinity.We show that an electrostatic model is sufficent to describe the resonances of interest, nevertheless, to design an optimal probe system an electromagnetic treatment is indispensable. 1