Assistant Professor, Electronics and Communication Engineering, G. H. Raisoni Academy of Engineering and Technology,

Abstract — Biosensor using MEMS i.e. BIOMEMS is a device which is used for various biomedical applications. This paper presents a cantilever based biosensor which converts biological recognition analysis into measurable mechanical displacement which is highly sensitive in nature. As the sensitivity of a device is the most important factor regarding to biomedical equipments, this paper deals with the sensitivity of a device. Sensitivity of a cantilever based biosensor decreases with decrease in the concentration of analytes. The sensitivity depends on its deflection of a cantilever based Bio-MEMS due to interaction between the analyte and its complementary bio-receptor molecules. Therefore, designing a cantilever based biosensor which can assay analytes in low concentration is important. The design and development of the cantilever based biosensor to make a device high sensitive either by using different shapes and sizes or a different material for a cantilever structure. This paper proposed to review on an improvement of the sensitivity of a conventional cantilever structure