Design of Current Pulser for Electrochemical Based Semiconductor Device Processes

Abstract- A Current pulser with sharp rise and fall time has been developed for conducting electrochemical processes in the field of semiconductor device technology. Starting with the block diagram of the basic unit of the pulser, it has been designed and developed such that the rise and fall times are in the range of nanoseconds and the pulse width may vary in the ranges of 50-100 nS. A variable delay circuit is designed with the help of logic gates by using the property of propagation delay accumulation of logic gates in a circuit for having the facility of variable pulse width. A presettable counter has also been designed to count the number of pulses for controlled process of electrochemical etching and deposition