DESIGN AND DEFORMATION ANALYSIS OF MEMS BASED PIEZORESISTIVE PRESSURE SENSOR

The present work reports about the design and simulation analysis of MEMS based piezoresistive pressure sensor. The design includes diaphragm using n-silicon material and piezoresistor using p-silicon material those are integrated on to diaphragm. Specifically, the proposed design has been simulated to get maximum deformation of diaphragm for small input of pressure. The design has been simulated for different crystallographic forms of silicon for different inputs Using COMSOL Multiphysics v 4.3b., the study is extended and analyses has been done such that flexibility of measuring pressure for polysilicon material has best performance compared to single crystal silicon and interchanged p-type, n-type of single crystal silicon