High-Speed High-Efficiency Large-Area Resonant Cavity Enhanced p-i-n Photodiodes for Multimode Fiber Communications

diodes with a 3-dB bandwidth in excess of 10 GHz for devices as large as 60- m diameter. Resonant cavity enhanced photodetec-tion is employed to improve quantum efficiency, resulting in more than 90 % peak quantum efficiency at 850 nm. Index Terms—High-speed optoelectronics, photodetectors, pho-todiodes, resonant cavity, pin diodes