Doping efficiency of Sb in ZnSe grown by MOVPE

Zinc selenide has been investigated for a candidate to a blue light emitting diode and a blue laser for a long time. There are two problems for a practical use which are to obtain a low resistive p−type ZnSe and to get a good ohmic contact to p−type ZnSe by a simple method. In metalorganic vapor phase epitaxy (MOVPE) a nitrogen doping for an acceptor impurity was done by using NH3. However, a nitrogen atom is partially inactive by a hydroge