Fabrication and Packaging Technologies of Love-wave-based Microbalance for Fluid Analysis

Sensors able to operate with liquid phases are the key-point for the development of bio-chemical lab-on-chip devices. In this work, we present the design and manufacture of Love wave sensors equipped with a liquid cell, at the wafer scale level, to allow operation with liquid media. Love wave sensors are fabricated on AT-cut quartz plates (IEEE Std-176 notation (YXlt)/36/90) and passivated by a 2.5 µm thick silica overlay. The fabrication process using the celebrated SU-8 epoxy-based photoresist combined with silicon or quartz machined covers is presented, revealing robust enough for ensur-ing a reproducible sensor fabrication and packaging. Results are reported emphasizing the efficiency of the proposed approach