On the mechanisms affecting aluminum transport and incorporation efficiency during AlGaN MOVPE

Elevated temperatures typically used to grow III−nitrides result in “switching on ” some physical−chemical mechanisms that are not so important for conventional III−V compounds. Such phenomena as the production of adducts via reactions between metalorganic precursors (TMGa, TMAl and the products of their decomposition) and ammonia, gas−phase clustering, and formation of particles in the reactor hot zones are generally recognized t