Impedance-Based Force Transduction Within

Abstract—We report on the use of electrochemical impedance (EI) as the basis for force transduction in Parylene-based micro-devices. Electrolyte-filled microstructures were realized for ex-tremely sensitive contact-force detection (10 mN range,±0.023 mN resolution) enabled by EI-based transduction and are a promis-ing platform for next-generation biomedical sensing technology. The design, fabrication, and characterization of Parylene-based electrochemical-MEMS (EC-MEMS) devices capable of mi-croNewton contact-mode force measurement are presented and discussed. [2011-0040] Index Terms—Biomimetic, contact sensor, electrochemical-MEMS (EC-MEMS), electrochemical sensing, electrochemica