C 2014 American Chemical Society Recovery of Permittivity and Depth from Near-Field Data as a Step toward Infrared Nanotomography

nfrared (IR) radiation is highly sensitive to the molecular and electronic properties of matter and thus provides an excellent probe for noninvasive identification and characterization of thin samples. By per-forming IR spectroscopy, such as Fourier transform infrared spectroscopy (FTIR),1 the chemical composition of materials can be identified. More quantitative details about the sample can be inferred by performing IR ellipsometry2 that returns dielectric permit-tivity of the sample material as well as its structural properties, such as thickness for thin samples and films. However, these far-field techniques are limited by diffractio