An Improved AFM Dynamic Imaging Method Based on Data Fusion of Neighboring Point Set

Abstract The atomic force microscopy (AFM) is an important tool in the field of nanotechnology and nanomanipulation. Based on the filtering and data fusion methods, this paper proposes an innovative imaging method to enhance the imaging precision of AFM along the Z direction. Specifically, this article first introduces the common imaging method utilized by commercial AFMs, then presents an improved dynamic imaging method based on data fusion of neighboring point set to deal with the large imaging error along the Z direction due to the AFM nonlinear characteristics when scanning a highly coarse surface or scanning with a high speed. Finally, some simulation and experimental results are included t