MICRODISCHARGE-BASED PRESSURE SENSORS FOR OPERATION AT 1000ºC

This paper reports microdischarge-based pressure sensors which operate by measuring the change in spatial current distribution of pulsed DC microdischarges. The sensors are composed of 3D arrays of horizontal bulk metal electrodes embedded in quartz substrates. Microdischarge-based pressure sensors are well-suited for high temperature operation because of the inherently high temperatures of the charged species that are generated. In this effort, temperatures of up to 1000˚C are tested. The pressure sensors have a measurable pressure range of 10-760 Torr and require an active area of only 0.8 mm2. The sensor structures are designed to allow for unequal expansion of electrodes and substrate, during high temperature operation. The sensors demonstrate a maximum sensitivity of 5,000 ppm/Torr and temperature coefficients of sensitivity as low as 44 ppm/K