MICROFLUIDIC OPTOMECHANICAL OSCILLATORS

We demonstrate a new class of fused silica MEMS that bridge between optomechanical and fluidic microsystems. Since fused silica is non-conductive and optically transparent, we employ “touch-less ” excitation by means of optical electrostriction and radiation pressure to excite surface-acoustic-wave whispering gallery modes and wineglass modes in these devices. This is the first demonstration of mechanical vibration that interacts with fluids, excited in a microstructure via optical forces. These mechanical oscillators operate over several orders-of-magnitude in frequency from 8.5 MHz – 11 GHz