A 2-D DIRECTIONAL AIR FLOW SENSOR ARRAY MADE USING STEREOLITHOGRAPHY AND MEMS MICRO-HYDRAULIC STRUCTURES

Here we report a 2-D directional micro-hydraulic hair-like airflow sensor (HAFS), where the hair appendages are made using stereo-lithography for inexpensive and rapid batch fabrication. The hair structures are optimized to significantly improve the HAFS performance. The maximum measured HAFS sensitivity is 47.9 fF/(m.s-1), a ten-fold increase over our previous uni-directional air-flow sensor [1]. The new sensor dynamic range is 0-15 m.s-1, with an extrapolated minimum detection limit of about 2 mm.s-1, and an angular resolution of 13°