Add to ORKGCooper, George (1996) The design, simulation and fabrication of microengineered silicon gyroscopes
SalCon Technology Corporation is developing a prototype electrostatically suspended micromechanical ...
This paper proposed a novel design of microgyroscope based on MEMS structures and optic interferomet...
Silicon sensors date back to before 1960 with early Hall and piezoresistive devices. These used simp...
Micromachined inertial sensors, consisting of accelerometers and gyroscopes are considered as one of...
Micromachined gyroscopes are probably the most challenging type of transducers ever attempted to be ...
10.1088/0960-1317/12/6/327Journal of Micromechanics and Microengineering126948-954JMMI
This volume includes the twenty papers which were presented at the Symposium Gyro Technology 1997. T...
This review surveys micromachined gyroscope structure and circuitry technology. The principle of mic...
Microelectromechanical systems (MEMS) is an evolution and expansion of micromachining technology. ME...
The current paper describes the design and fabrication of a micromachined electrostatically suspende...
Thesis (MTech (Electrical Engineering))--Cape Peninsula University of Technology, 2007Micro Electro-...
MEMS (Micro-electro-mechanical Systems) refer to devices or systems integrated with electrical and m...
Design and analysis of polysilicon and single crystal silicon gyroscopes have been carried out. Vari...
This paper presents research at The University of Michigan on micromachined capacitive silicon accel...
The existing analysis methods for the silicon gyroscope drive loop, such as the perturbation method ...
SalCon Technology Corporation is developing a prototype electrostatically suspended micromechanical ...
This paper proposed a novel design of microgyroscope based on MEMS structures and optic interferomet...
Silicon sensors date back to before 1960 with early Hall and piezoresistive devices. These used simp...
Micromachined inertial sensors, consisting of accelerometers and gyroscopes are considered as one of...
Micromachined gyroscopes are probably the most challenging type of transducers ever attempted to be ...
10.1088/0960-1317/12/6/327Journal of Micromechanics and Microengineering126948-954JMMI
This volume includes the twenty papers which were presented at the Symposium Gyro Technology 1997. T...
This review surveys micromachined gyroscope structure and circuitry technology. The principle of mic...
Microelectromechanical systems (MEMS) is an evolution and expansion of micromachining technology. ME...
The current paper describes the design and fabrication of a micromachined electrostatically suspende...
Thesis (MTech (Electrical Engineering))--Cape Peninsula University of Technology, 2007Micro Electro-...
MEMS (Micro-electro-mechanical Systems) refer to devices or systems integrated with electrical and m...
Design and analysis of polysilicon and single crystal silicon gyroscopes have been carried out. Vari...
This paper presents research at The University of Michigan on micromachined capacitive silicon accel...
The existing analysis methods for the silicon gyroscope drive loop, such as the perturbation method ...
SalCon Technology Corporation is developing a prototype electrostatically suspended micromechanical ...
This paper proposed a novel design of microgyroscope based on MEMS structures and optic interferomet...
Silicon sensors date back to before 1960 with early Hall and piezoresistive devices. These used simp...