Adaption and Flux Discretizations for Dopant Diffusion Modelin

Abstract- Mesh generation and adaption for solving dopant diffusion in process simulation is a difficult task, complicated by both the moving boundaries of oxide growth [l] and the time dependence of the solutions. For both computational and ease of use reasons, automatic mesh generation [2] and discretization error control [3] is desirable. This paper describes an approach based on local error estimates [4] to refine the mesh. The results presented in this paper extend our previous work [5] to two-dimensional problems. The implementation of this approach is done in a process simulator, the Florida Object-Oriented Process Simulator. Several test cases are described to demonstrate the effectiveness of the algorithms. I