Silicon Carbide Micro/Nano-Systems for Extreme Environment

A number of industries such as automotive, health and energy require micro-sensors and actuators that can survive harsh environments, such as high temperatures, pressures and relative humidity. However, the materials properties of silicon impose limitations on its use in harsh environment and demanding applications. Silicon carbide (SiC) is an alternative semiconducting material that enables such applications because of its wider bandgap and higher melting/sublimation temperature, elastic modulus, fracture toughness, hardness, chemical inertness, and thermal conductivity. This presentation will discuss recent advances in SiC-based microelectromechanical systems (MEMS) for harsh environment sensors. It will cover single