Add to ORKGThis paper shows improved phase-noise performance of MEMS oscillators when the sustaining amplifier operates a lateral bulk acoustic wave AlN-on-Si resonator in the nonlinear regime. An empirical exponential-series-based model that closely describes the phase noise in nonlinearity is presented, reflecting the increased resonator filter order and the reduced amplifier flicker-noise contribution. An oscillator using a 23MHz in-plane shear mode resonator with a quality factor of 4,000 exhibits a phase noise of-130dBc/Hz at 1KHz offset-frequency, corresponding to an improvement of about 20dB with respect to linear operation
Linear models for oscillator noise predict an improvement in frequency stability with increasing qua...
In recent years, there has been much interest in the design of low-noise MEMS oscillators. This pape...
A new analytical formulation for phase noise in MEMS oscillators was recently presented encompassing...
Abstract—Nonlinear effects in single-crystal silicon microres-onators are analyzed with the focus on...
This dissertation explores the performance capabilities, limitations, and theoretical analysis of mi...
Phase noise in capacitively coupled micro-resonator-based oscillators is investigated. A detailed an...
In oscillator circuits, a resonator acts as a frequency selective network. Nonlinearities in the res...
The fundamental performance limit of single-crystal silicon resonators set by device nonlinearities ...
Microelectromechanical system (MEMS) oscillators are conventionally designed so that the resonator i...
Abstract — In oscillator circuits, a resonator acts as a frequency selective network. Nonlinearities...
Abstract-In this paper, we report the manipulation of nonlinear behavior in a bulk-mode micromechani...
In recent years, there has been much interest in the design of low-noise MEMS oscillators. This pape...
A micromechanical 13.1-MHz bulk acoustic mode silicon resonator having a high quality factor (Q=130 ...
Linear models for oscillator noise predict an improvement in frequency stability with increasing qua...
In recent years, there has been much interest in the design of low-noise MEMS oscillators. This pape...
A new analytical formulation for phase noise in MEMS oscillators was recently presented encompassing...
Abstract—Nonlinear effects in single-crystal silicon microres-onators are analyzed with the focus on...
This dissertation explores the performance capabilities, limitations, and theoretical analysis of mi...
Phase noise in capacitively coupled micro-resonator-based oscillators is investigated. A detailed an...
In oscillator circuits, a resonator acts as a frequency selective network. Nonlinearities in the res...
The fundamental performance limit of single-crystal silicon resonators set by device nonlinearities ...
Microelectromechanical system (MEMS) oscillators are conventionally designed so that the resonator i...
Abstract — In oscillator circuits, a resonator acts as a frequency selective network. Nonlinearities...
Abstract-In this paper, we report the manipulation of nonlinear behavior in a bulk-mode micromechani...
In recent years, there has been much interest in the design of low-noise MEMS oscillators. This pape...
A micromechanical 13.1-MHz bulk acoustic mode silicon resonator having a high quality factor (Q=130 ...
Linear models for oscillator noise predict an improvement in frequency stability with increasing qua...
In recent years, there has been much interest in the design of low-noise MEMS oscillators. This pape...
A new analytical formulation for phase noise in MEMS oscillators was recently presented encompassing...