Compact Silicon Tunable Fabry-Pérot Resonator With Low Power Consumption

Abstract—We demonstrate a 20- m-long tunable optical resonator integrated on a silicon-on-insulator waveguide. The microresonator consists of a planar Fabry–Pérot microcavity defined by deep Si/SiO 2 Bragg reflectors with a high finesse of 11.2. The device is electrically driven and shows a modulation depth as high as 53 % for a power consumption of only 20 mW. Index Terms—Bragg reflector, Fabry–Pérot (F-P) cavity, inte-grated optics, optical modulator, silicon optoelectronics. I