Improving Evolutionary Synthesis of MEMS through Fabrication and Testing Feedback

Abstract- A test-feedback strategy is described for improving evolutionary synthesis based on the results from the fabrication and characterization of output from a genetic algorithm(GA)-based synthesis program. Simulator and fabrication conditions lead to certain configurations of output differing significantly from predicted performance when fabricated and measured. Using lessons learned from a microelectromechanical system (MEMS) synthesis characterization study, four modifications to the objectives and constraint settings of the GA formulation are evaluated to produce results that more closely match desired performance when fabricated. Statistical tests show improvement in the quality of the GA’s output, producing designs with significantly less simulation and fabrication errors using the proposed methods