Add to ORKGThis manuscript describes the use of water-soluble polymers for use as sacrificial layers in surface micromachining. Water-soluble polymers have two attractive characteristics for this application: 1) They can be deposited conveniently by spin-coating, and the solvent removed at a low temperature (95–150 8C), and 2) the resulting layer can be dissolved in water; no corrosive reagents or organic solvents are required. This technique is therefore compatible with a number of fragile materials, such as organic polymers, metal oxides and metals—materials that might be damaged during typical surface micromachining processes. The carboxyl-ic acid groups of one polymer—poly(acrylic acid) (PAA)—can be trans-formed by reversible ion-exchange from wat...
In this paper we report a new method for the electrochemical deposition of a metal/polymer composite...
The ability to pattern functional polymers at different length scales is important for the advanceme...
This thesis is concerned with the chemical modification of polymer surfaces to confer various functi...
The unprecedented triumph of silicon technology in modern high tech applications was and is strongly...
This thesis describes work performed on a novel form of surface-micromachining, called self-sacrific...
Fabrication of miniaturized devices is usually time-consuming, costly, and the materials commonly us...
In this paper, we discussed the process to use polyimide as sacrificial layer for micromachining. Th...
We investigate in the present work the fabrication of polymer-based micro-fluidic and micro-mechanic...
The ability to form patterns of chemically reactive surface functionalities in microanalytical devic...
This cumulative doctoral dissertation deals with the use of diverse polymers in different applicati...
This thesis involves descriptions of solid surface modifications with various polymeric materials wh...
Surface modification is very important in tailoring materials properties. Various methods and materi...
This thesis introduces a new emulsion polymerization technique called mini monomer encapsulated emul...
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 2002.Includes b...
This paper proposes a facile, versatile, and low-cost approach for batch production of engineered su...
In this paper we report a new method for the electrochemical deposition of a metal/polymer composite...
The ability to pattern functional polymers at different length scales is important for the advanceme...
This thesis is concerned with the chemical modification of polymer surfaces to confer various functi...
The unprecedented triumph of silicon technology in modern high tech applications was and is strongly...
This thesis describes work performed on a novel form of surface-micromachining, called self-sacrific...
Fabrication of miniaturized devices is usually time-consuming, costly, and the materials commonly us...
In this paper, we discussed the process to use polyimide as sacrificial layer for micromachining. Th...
We investigate in the present work the fabrication of polymer-based micro-fluidic and micro-mechanic...
The ability to form patterns of chemically reactive surface functionalities in microanalytical devic...
This cumulative doctoral dissertation deals with the use of diverse polymers in different applicati...
This thesis involves descriptions of solid surface modifications with various polymeric materials wh...
Surface modification is very important in tailoring materials properties. Various methods and materi...
This thesis introduces a new emulsion polymerization technique called mini monomer encapsulated emul...
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 2002.Includes b...
This paper proposes a facile, versatile, and low-cost approach for batch production of engineered su...
In this paper we report a new method for the electrochemical deposition of a metal/polymer composite...
The ability to pattern functional polymers at different length scales is important for the advanceme...
This thesis is concerned with the chemical modification of polymer surfaces to confer various functi...