HIGH SPEED SEMICONDUCTOR FAB SIMULATION FOR LARGE, MEDIUM AND SMALL LOT SIZES

This paper describes an analysis performed to assess the fidelity, scalability, and performance of the Sage ® Fab Advisor ™ semiconductor fab simulation engine executing two years of fab operations across a range of lot sizes. We describe the demand and fab operations models used, as well as the tools and methodology used in conducting the analysis. Our results were validated against a well-known model running on a well-known toolset, showing performance to be very competitive with that model. Further, we show that our engine’s performance, running this model, scales almost linearly from 25 wafer lot sizes down to single wafer lot sizes. That is, simulation time increases roughly linearly with respect to the number of lots being processed