ION-BEAM DEPOSITION OF NbN C THIN FILMS FOR

We have fabricated high qual i ty superconduct ing NbNxC t h i n films us ing a low-energy dual ion-beam f a b r i g a t i o n method. I n t h i s method, one i on beam s p u t t e r s Nb t o the s u b s t r a t e while the second beam bombards the growing film wi th low energy (-100 eV) N 2 t C H 4 ions. The use o f methane a s a source of carbo