High-Aspect-Ratio SOI Vibrating Micromechanical Resonators and Filters

Abstract- This paper presents a review of single crystal silicon bulk acoustic wave resonators and filters. Silicon-on-insulator (SOI) substrates are utilized to implement high quality factor (Q) integrated silicon resonators with capacitive and/or piezoelectric transducers. These resonators cover a wide range of frequencies including HF, VHF and UHF. Index Terms- Micromechanical resonators, SOI, micromechanical filters, bulk acoustic wave resonator, MEMS. I