doi:10.1155/2008/782764 Research Article Micro-Optoelectromechanical Tilt Sensor

This paper presents a novel hybrid CMOS/MEMS tilt sensor with a 5 ◦ resolution over a 300 ◦ range. The device uses a MEMS-based semicircular mass suspended from a rigid body, projecting a shadow onto the CMOS-based optical sensor surface. A one-dimensional photodiode array arranged as a uniformly segmented ring is then used to determine the tilt angle by detecting the position of the semicircular mass. The complete sensor occupies an area of under 2.5 mm × 2.5 mm. Copyright © 2008 Timothy G. Constandinou and J. Georgiou. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. 1