Design and Realization of Sensor System for Flow Measurement

www.micro.feld.cvut.cz Abstract:- The article describes design and realization of an airflow structure for measurement. There are structure and electronic circuits design in the paper are described The principle of a flowmeter sensor operation is based on the mechanism of a fluidic oscillator. It uses fluidic paths in feedback. Oscillator samples have been made using different technologies and materials. Micromechanical shaping, etching and sticking as basic operations have been used. Further there is described design, construction and measured results of the developed flowmeter with a fluidic oscillator for measurement of fluid flow. Measured fluid flow is displayed on a digital or analog measuring device calibrated in values of immediate flow amount or flow velocity. A CoventorWare software was used for design of mechanical behaviour and CADENCE software was used for electronic circuits design