Modularized Modeling of Measurement Processes in Micro- and Nanometrology for Measurement Uncertainty Evaluation

Abstract: Measurement uncertainty characterizes the quality of a measurement result. It is determined according GUM by modeling the measurement process with all effective influences. Compared to conventional measure-ment processes detailed models in micro- and nano-metrology are not yet sufficiently published due to ongoing research on influences and correlations. In the paper the modeling background according GUM [1] is shown and research results and a demo application in modularization of measurement processes in micro and nanotechnology will be presented