A 4096 Element Continuous Facesheet MEMS Deformable Mirror for High-Contrast Imaging

This paper presents the progress in the development of a 4096 element MEMS deformable mirror, fabricated using polysilicon surface micromachining manufacturing processes, with 4µm of stroke, a surface finish of less than 10nm RMS, a fill factor of 99.5%, and bandwidth greater than 5kHz. The packaging and high speed drive electronics for this device, capable of frame rates of 22 kHz, are also presented. Keywords: Deformable mirror, MEMS, adaptive optics, wavefront correctio