2D and 3D Numerical Modelling of FZ Large Silicon Single Crystal

The floating zone (FZ) growth with the needle-eye inductor is a process with many coupled parameters that have nonlinear influence on the growth stability and resistivity distribution in the grown single crystal. To fulfil the requirements of semiconductor industry, changing the process parameters and creating additional magnetic fields is used nowadays to optimise the growth process. The present paper illustrates the possibilities of making predictions about the crystal quality by means of numerical modelling concerning the influence of diverse magnetic fields, crystal rotation rates and inductor slit widths on the melt motion and resistivity distribution in the grown crystal