1 American Institute of

This is a report on work in progress on microelectrical and mechanical systems (MEMS)-based gas turbine en-gines, turbogenerators, and rocket engines currently un-der development at MIT. Fabricated in large numbers in parallel using semiconductor manufacturing techniques, these engines are based on micro-high speed rotating machinery with the same power density as that achieved in their more familiar, full-sized brethren. The micro-gas turbine is a 1 cm diameter by 3 mm thick SiC heat engine designed to produce 10-20 W of electric power or 0.05-0.1 Nt of thrust while consuming under 10 grams/hr of H2. Later versions may produce up to 100 W using hy-drocarbon fuels. A liquid fuel, bi-propellant rocket mo-tor of similar size could develop over 3 lb of thrust. The rocket motor would be complete with turbopumps and control valves on the same chip. These devices may en-able new concepts in propulsion, fluid control, and por-table power generation