NANOMEFOS Nanometer Accuracy Non-contact Measurement of Free-form Optical Surfaces

E-mail address correspondin This paper describes a conceptual measuremen contact form measurement of free-form optical 30 nm (k = 2). This conceptual design is the res Eindhoven University of Technology (TU/e) in study has started at TU/e called NANOMEFOS of Free-form Optical Surfaces), to further requirements and current metrology methods wi Next, the machine concept and the calculation short overview of the current design will be giv