Abstract. Zr1-xAlxN layers have been deposited in the full compositional range (x = 0…1) by adjust-ing working point and pulse times for reactive pulsed magnetron co-sputtering of aluminium and zirconium targets. Whereas ZrN is known to be a hard coating material with properties similar to the well established TiN, yet a higher oxidation resistance, no enhanced hardness is found for Zr1-xAlxN in a range x=0.3…0.9, as it is the case for Ti1-xAlxN with x = 0.5…0.7. However, films with a fraction of only a few atomic percent aluminium exhibit enhanced hardness up to 30 GPa, which is well above the hardness of pure ZrN or pure AlN (25 GPa both) deposited by reactive pulse magnetron sputtering. XRD investigations reveal the nanocrystalline natur...
A d.c. reactive magnetron sputtering technique was used to deposit (Ti, Si, Al)N films. The ion curr...
AbstractZrAlN/Cu coating has been deposited onto Ti-6Al-4V substrate by reactive magnetron sputterin...
Zr-V-N coatings with varying Zr and V content were deposited by magnetron sputtering. Transmission e...
In this work, the composition and the microstructure of two-phase hard coatings have been varied by ...
Structure and mechanical properties of nanoscale multilayers of ZrN/Zr0.63Al0.37N grown by reactive ...
Stoichiometric Ti(sub 1-x)Al(sub x)N layers with 0.55 < x < 0.57 have been deposited by adjusting wo...
Tools have been used under very high temperature in recent decades. Therefore, coatings on tools are...
Ever since the hard coatings have been introduced, there has been a constant push for better mechani...
AbstractThe influence of reactive and non-reactive sputtering on structure, mechanical properties, a...
DC reactive magnetron sputtering was used for the deposition of Zr–Si–N thin films. Four series of s...
The performance of transition metal nitride based coatings deposited by magnetron sputtering, in a b...
ZrMoN thin films were deposited using reactive magnetron sputtering, with the aim to study the influ...
Mechanical property and thermal stability of Zr-Si-N films of varying silicon contents deposited on ...
Various approaches to creating multicomponent na-nocomposite coatings of high and superhigh hardness...
In this study, five AlTiCrN nitride coatings were deposited via high-power impulse magnetron sputter...
A d.c. reactive magnetron sputtering technique was used to deposit (Ti, Si, Al)N films. The ion curr...
AbstractZrAlN/Cu coating has been deposited onto Ti-6Al-4V substrate by reactive magnetron sputterin...
Zr-V-N coatings with varying Zr and V content were deposited by magnetron sputtering. Transmission e...
In this work, the composition and the microstructure of two-phase hard coatings have been varied by ...
Structure and mechanical properties of nanoscale multilayers of ZrN/Zr0.63Al0.37N grown by reactive ...
Stoichiometric Ti(sub 1-x)Al(sub x)N layers with 0.55 < x < 0.57 have been deposited by adjusting wo...
Tools have been used under very high temperature in recent decades. Therefore, coatings on tools are...
Ever since the hard coatings have been introduced, there has been a constant push for better mechani...
AbstractThe influence of reactive and non-reactive sputtering on structure, mechanical properties, a...
DC reactive magnetron sputtering was used for the deposition of Zr–Si–N thin films. Four series of s...
The performance of transition metal nitride based coatings deposited by magnetron sputtering, in a b...
ZrMoN thin films were deposited using reactive magnetron sputtering, with the aim to study the influ...
Mechanical property and thermal stability of Zr-Si-N films of varying silicon contents deposited on ...
Various approaches to creating multicomponent na-nocomposite coatings of high and superhigh hardness...
In this study, five AlTiCrN nitride coatings were deposited via high-power impulse magnetron sputter...
A d.c. reactive magnetron sputtering technique was used to deposit (Ti, Si, Al)N films. The ion curr...
AbstractZrAlN/Cu coating has been deposited onto Ti-6Al-4V substrate by reactive magnetron sputterin...
Zr-V-N coatings with varying Zr and V content were deposited by magnetron sputtering. Transmission e...