(5B.1) Generation of Meshes for the Simulation

With the growing complexity of semicon-ductor devices and the use of increasingly so-phisticated device simulation packages to pro-totype these devices, new demands have been made on the speed and efficiency of mesh gen-erators and the sophistication of the meshes that are created. The simulation of power devices puts more stringent requirements on the mesh genera-tion, because of the very large sizes and the important influence of the geometry. Also, the numerical problems increase because of the possibly large gradients in the physical pa-rameters. This puts a higher pressure on the quality of the meshes with respect to the dis