X-ray Texture Analysis of Thin Films by the Reflection Method: Intermediate Regime in Defocusing Corrections

This paper gives the angular domains of validity for corrections of experimental data obtained from the texture analysis of thin films, multilayers and covered substrates by the Schulz reflection technique. The behaviours of defocusing curves versus material constants are given as examples and their effects on correction curves are shown. The correction formulas for characteristic types of multilayers are also deduced and are illustrated for one example. 1