Add to ORKGA resistive sensor array is presented for two dimensional temperature distribution measurements in a micromachined flow channel. This allows simultaneous measurement of flow velocity and fluid parameters, like thermal conductivity, diffusion coefficient and viscosity. More general advantages of measuring temperature distributions are the inherent compensation of heat losses to the support and the insensitivity to variations in the temperature coefficient of resistance. I
A review is given on sensors fabricated by silicon micromachining technology using the thermal domai...
There is cUlTently a lack of quality sensing techniques that can provide the required spatial and te...
Experiments devoted to evaluate the performance of a MEMS thermal flow sensor in measuring gas volum...
A thermal mass flow sensor with high dynamic flow range in silicon bulk micromachining membrane tech...
An array of integrated thermal micro sensors was successfully designed, fabricated and characterized...
AbstractA novel dual-Thermal conductivity detector (TCD) is presented for in-line flow compensation....
In this thesis thermal sensor-actuator structures are proposed for measuring the parameters pressure...
Micromachined hotplates, membranes, filaments, and cantilevers have all been used as platforms for t...
The point measurement of velocity of gaseous fluids has been made for some time with hot wire anenom...
This article presents microchannel thermal flow sensors fabricated using standard micromachining tec...
The micromechanical equivalent of a differential pressure flow-sensor, well known in macro mechanics...
In this work, a novel approach is presented for in-line flow compensation using a dual-Thermal condu...
The physical and technical characteristics, structural and topological aspects of the micromechanica...
Conventional thermal conductivity detectors (TCDs) demonstrate a flow dependence. The approach prese...
Abstract—To compensate for changes in ambient temperature, thermal flow sensors are usually heated t...
A review is given on sensors fabricated by silicon micromachining technology using the thermal domai...
There is cUlTently a lack of quality sensing techniques that can provide the required spatial and te...
Experiments devoted to evaluate the performance of a MEMS thermal flow sensor in measuring gas volum...
A thermal mass flow sensor with high dynamic flow range in silicon bulk micromachining membrane tech...
An array of integrated thermal micro sensors was successfully designed, fabricated and characterized...
AbstractA novel dual-Thermal conductivity detector (TCD) is presented for in-line flow compensation....
In this thesis thermal sensor-actuator structures are proposed for measuring the parameters pressure...
Micromachined hotplates, membranes, filaments, and cantilevers have all been used as platforms for t...
The point measurement of velocity of gaseous fluids has been made for some time with hot wire anenom...
This article presents microchannel thermal flow sensors fabricated using standard micromachining tec...
The micromechanical equivalent of a differential pressure flow-sensor, well known in macro mechanics...
In this work, a novel approach is presented for in-line flow compensation using a dual-Thermal condu...
The physical and technical characteristics, structural and topological aspects of the micromechanica...
Conventional thermal conductivity detectors (TCDs) demonstrate a flow dependence. The approach prese...
Abstract—To compensate for changes in ambient temperature, thermal flow sensors are usually heated t...
A review is given on sensors fabricated by silicon micromachining technology using the thermal domai...
There is cUlTently a lack of quality sensing techniques that can provide the required spatial and te...
Experiments devoted to evaluate the performance of a MEMS thermal flow sensor in measuring gas volum...