1 Development of humidity sensors based on nanostructured carbon films

Humidity sensors based on clusters assembled nanostructured carbon films in capacitive configuration have been manufactured and characterized. An electronic read-out system has been designed and implemented in order to measure the complex impedance of the device under operation. Devices under test show a fast dynamic response and a good sensitivity compared to capacitive commercial systems. A linear response is observed for relative humidity in the range 2-70%. Hysteresis is practically absent in this range, while for higher values it is at most of the order of 2%