Simulation and model reduction methods for an RF plasma glow discharge

In this paper, we report on numerical solutions and model reduction results for a plasma glow discharge model with a radio frequency ionization source. A pseu-dospectral implementation of a global spectral method was found to give accurate simulation results that correctly reflected the expected physical behavior of an argon plasma under the simulated operating conditions. Numerical residual analysis was used to confirm solution convergence. Using snapshots taken from the detailed sim-ulations, a reduced basis was generated in terms of two groups of empirically deter-mined eigenfunctions, distinguished by their type of boundary conditions (Dirichlet vs Neumann). With this model reduction approach, it was found that the state vari-ables can be accurately predicted by projecting the original modeling equations onto the reduced basis with considerable computational savings over the original simula-tions. Limitations of the model reduction method in predicting secondary (derived) quantities are discussed. c ° 2001 Academic Press Key Words: collocation; global basis functions; glow discharge; model reduction; plasma processing; pseudospectral methods. 1