Coherent control in nanolithography: Rydberg atoms

A technique based on coherent control for the optical manipulation of deposition patterns in nanofabrication with neutral atomic beams is described. The theory, optical nanolithography with bichromatic fields, is then applied to the deposition of rubidium Rydberg atoms on surfaces. Controllable nonperiodic patterns and deposition lines are shown to be possible due to interference contributions to the induced polarizability. I