Control of Micro Mirrors for High Precision Performance

Microelectromechanical Systems (MEMS) technology has already led to advances in optical imaging, scanning, communications and adaptive applications. Many of these efforts have been approached without the use of feedback control techniques that are common in macro-scale operations to ensure repeatable and precise performance. This paper examines control techniques and related issues of precision performance as applied to a one-degree-of-freedom electrostatic MEMS micro mirror