A framework for standard modular simulation in semiconductor wafer fabrication systems

This paper presents the application of a framework, pro-posed by the National Institute of Standards and Technology (NIST), for standard modular simulation in semiconductor wafer fabrication facilities (fabs). The application of the proposed framework resulted in the identification and speci-fication of four different elements in the context of semicon-ductor fabs: (1) market sector, (2) hierarchical modeling levels, (3) simulation case studies, (4) models and data. An example of the application of the proposed simulation framework to a benchmark semiconductor fab model, the so-called Mini-fab, is presented. In this example, evalua-tion of production performance under different workforces is studied. Current and future research is focused on the improvement of the proposed framework (e.g., design and testing of generic case studies).