THERMAL WAVE PROBING OF THE OPTICAL, ELECTRONIC AND THERMAL PROPERTIES OF SEMICONDUCTORS

Abstract: In this paper we will demonstrate how the thermal waves have been revealed to be a good probe for the detection of free carriers dynamic and consequently for the determination of electronic parameters determination. After the detailed description of the two setups we have used ( mirage and photoreflectance), we will explain how to proceed to achieve theoretical calculations either in a 1D geometry or in a 3D one. We will then illustrate our demonstration with examples taken in spectroscopy investigation domain (photothermal study of amorphous silicon), in thermal parameter determination, and in transport properties evaluation ( photothermal study of bulk silicon or silicon wafer) with different spatial resolutions. Finally, we will emphazise that using a dye laser for excitation instead of an Argon one and intermediate frequency modulation range, can allow more precise determination of electronic parameters