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eaffect the scattering process of the energy carriers. Although theo-ries have been developed to predict the thermal conductivity of thin films, experiments are often needed to determine thermal con-ductivity of thin films owing to the complexity of the thin film microstructure. Since the microstructures of thin layers depend strongly on fabrication techniques, thermal conductivity measure-ments must be performed on the same microstructures fabricated with the same processes as those used in real devices for which the thermal conductivity is needed. In the last decade, many tech-niques have been developed to measure thermophysical properties of thin film materials. Goodson and Fli