RF discharge characteristics from particle model based on two optimized Monte Carlo methods for collision treatment

Particle models using the classical Particle in Cell/Monte Carlo technique have been developed and used for the simulation of the charged particles transport in the case of low pressure RF discharges. Argon at 50 mtorr up to 100 mTorr is chosen as a gas test (for RF frequency 13.56 MHz and voltage 200 V) in the case of an asymmetric reactor in a 2D cylindrical geometry. Two techniques have been used for the collision treatment. The first one is based on an optimized estimation of the collision free path which is independent of the electron energy. It depends only on the maximum of total cross sections. The second one is based on the free time of flight using the null collision technique. Good agreements are found between both methods. Comparison is also done with literature experimental results