High-Q Solenoidal Inductive Elements

Abstract- A solenoid-like magnetic-storage element em-bedded in high-resistivity silicon is presented that maintains well-defined signal and signal return-paths. By not being focused on creating a lumped inductor equivalent, the design space is opened up. At 5 GHz an effective inductance of 1.9 nH with a Q of 30 increasing to a 10.6 nH inductance with a Q of 11 were achieved. I