Structural characterization of vacuum evaporated ZnSe thin films

Abstract. Thermally evaporated ZnSe thin films deposited on glass substrates within substrate temperatures (Ts) at 303 K–623 K are of polycrystalline nature having f.c.c. zincblende structure. The most preferential ori-entation is along [111] direction for all deposited films together with other abundant planes [220] and [311]. The lattice parameter, grain size, average internal stress, microstrain, dislocation density and degree of pre-ferred orientation in the film are calculated and correlated with Ts