Recent advances in oxide film characterization

Abstract- This paper considers the application of surface-analytical techniques to characterize both thin (-2 nm) passive oxide films and thick (up to 1 pm) oxides formed on metals and alloys a t high temperature. Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS), Mossbauer spectroscopy, X-ray absorption near edge spectroscopy (XANES), secondary ion mass spectrometry (SIMS) and electron energy-loss (EEL) microscopy are considered. Emphasis is placed on the use of SIMS and EEL microscopy to provide chemical information a t high spatial resolution. Characterization of oxide films on an atomic scale leads to a better understanding of the processes which take place during corrosion and oxidation