Add to ORKGIt is a known fact that a-C:H can be deposited at high rates by injecting acetylene (or other precursor gases) in an expanding thermal plasma created by means of a cascaded arc. Injected hydrocarbons are dissociated and react differently for various plasma parameters. Using Cavity Ring Down Spectroscopy (CRDS), CH and C2 radicals were identified and quantifie
Mol. dynamics simulations have been performed to investigate the role of H- and C-fluxes on the stru...
a-C:H thin films are deposited by plasma-enhanced chemical vapor deposition PE-CVD at 13.56 MHz at r...
This thesis is dedicated to the production and analysis of thin hydrogenated amorphous carbon films....
It is a known fact that a-C:H can be deposited at high rates by injecting acetylene (or other precur...
Plasma chemistry in an argon/acetylene expanding thermal plasma was studied by means of a residual g...
The primary aim of this thesis is to contribute to the knowledge of the plasma assisted growth mecha...
Acetylene chemistry is studied by means of threshold ionization mass spectrometry (TIMS) in remote A...
Plasma deposition and properties of a-C:H are reviewed and recent results on the process characteriz...
Diamondlike amorphous hydrogenated carbon is deposited from an expanding thermal argon/acetylene pla...
Plasma deposition and properties of a-C:H are reviewed. The role of process gas, plasma chemistry an...
High quality diamondlike a-C:H has been deposited, at low ion bombardment energies, from an expandin...
The aim of this article is to determine the role of carbon atoms in the growth of hydrogenated amorp...
Mol. dynamics simulations have been performed to investigate the role of H- and C-fluxes on the stru...
a-C:H thin films are deposited by plasma-enhanced chemical vapor deposition PE-CVD at 13.56 MHz at r...
This thesis is dedicated to the production and analysis of thin hydrogenated amorphous carbon films....
It is a known fact that a-C:H can be deposited at high rates by injecting acetylene (or other precur...
Plasma chemistry in an argon/acetylene expanding thermal plasma was studied by means of a residual g...
The primary aim of this thesis is to contribute to the knowledge of the plasma assisted growth mecha...
Acetylene chemistry is studied by means of threshold ionization mass spectrometry (TIMS) in remote A...
Plasma deposition and properties of a-C:H are reviewed and recent results on the process characteriz...
Diamondlike amorphous hydrogenated carbon is deposited from an expanding thermal argon/acetylene pla...
Plasma deposition and properties of a-C:H are reviewed. The role of process gas, plasma chemistry an...
High quality diamondlike a-C:H has been deposited, at low ion bombardment energies, from an expandin...
The aim of this article is to determine the role of carbon atoms in the growth of hydrogenated amorp...
Mol. dynamics simulations have been performed to investigate the role of H- and C-fluxes on the stru...
a-C:H thin films are deposited by plasma-enhanced chemical vapor deposition PE-CVD at 13.56 MHz at r...
This thesis is dedicated to the production and analysis of thin hydrogenated amorphous carbon films....