Engineering Education in the Nanomachining Technology Curriculum

ABSTRACT: Prospective and current machining technologies in nano-scale features are introduced in this subject. Conventional machining technologies are based on the top-down method to make engineering products. Using various tooling machines to fabricate components in all kinds of materials is included in this category. It also extends to engineering features in nano-scale. However, the bottom-up method is the other approach to create engineering products. It is based on the basic chemical reaction using atoms accumulation and atomic synthesis for super molecule formation. These two principles provide main trends for nanomachining technologies. In view of engineering aspects, both theories and experiments of nanotechnology should be connected into a practical object. This subject includes practical machining methods and related theories for engineering education in nanotechnology. Fundamental processing technologies in the nanomachining are based on MEMS (microelectromechanical system) technology. MEMS technology opens a window to explore nanomachining technology and provides a step to jump into quantum devices. The curriculum has to start MEMS technology and scale effect on the nano-world. Tools and techniques of nanofabrication are introduced for students ’ understanding on present machining progress. Nanolithography process is based on microlithography development for advanced ULSI application. It is an important technique in th