1DEVELOPMENT OF NSC KIPT NUCLEAR MICROPROBE

Development of the microanalysis methods is stimulated by investigations of actual materials. Their properties depend not only on an atomic structure, but also on imperfections of this structure, phase composition, areas of impurity accumulation, various kinds of microinclusions etc. Characteristic sizes of these objects are usually ranged from a few parts of micron to several tens of micron. So, there is need for methods which provide the analysis of chemical elements in samples with the corresponding level of spatial resolution. In the development of semiconductor materials and materials for microelectronics, in laser engineering, in the production of various kinds of composite materials and alloys with multiphase structure, and als